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20 Funny Cars - 24 Images - 7 Object - m.. Fazla Jatta. Add Full Options. 20 Funny Cars - 24 Images - 7 Object - m.. Free Photos?Full, American cars, American Classic Cars, Cars And Trucks,In recent years, miniaturization and power-saving of semiconductor devices have been demanded in the field of communication devices such as mobile phones, and highly integrated, highly reliable, low-power-consumption semiconductor devices have been in demand.
As an example of a semiconductor device, a capacitor device in which a plurality of capacitor electrodes are integrated (for example, see Non-Patent Document 1) has been proposed.
The capacitor device is a memory device with the function of storing information. In the capacitor device, a plurality of capacitor electrodes are formed on a semiconductor substrate. These capacitor electrodes are connected to each other via a contact plug, a bit line, and a word line.
The capacitor electrodes are formed to be close to each other. This may decrease a distance between the contact plug, bit line, and word line and the capacitor electrodes, and reduce the distance between wirings. However, as miniaturization of semiconductor devices advances, a distance between the capacitor electrodes in each of the wiring layers becomes small. When the distance between the capacitor electrodes becomes small, there arises a problem in that the shape of the capacitor electrode is deviated from a desired shape due to a step difference, which is formed by a difference in height between the wiring layer and the semiconductor substrate and which corresponds to an insulation film and a silicon oxide film. When the shape of the capacitor electrode is deviated from the desired shape, a problem arises in that the capacitance of the capacitor electrode increases due to the deviation.
In this context, a capacitor electrode is rounded by a chemical mechanical polishing (CMP) technique (for example, see Patent Document 1). According to this technique, a cylindrical stopper for polishing is arranged around a lower portion of a capacitance electrode formation layer, and a polishing process is performed by the stopper. In this way, by forming a structure in which a plurality of cylindrical capacitor electrodes are arranged in a semiconductor substrate, the shapes of the capacitor electrodes can be stabilized. 0b46394aab